Generation of Surface Amino Groups on Aromatic Self‐Assembled Monolayers by Low Energy Electron Beams—A First Step Towards Chemical Lithography

By W. Eck, V. Stadler, W. Geyer, M. Zharnikov, A. Gölzhäuser, M. Grunze. 2000

162 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8d2dc89dbed25dacbae2428e16dfa35fc3e2a197

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1. H. M. Saavedra
2. T. Mullen
3. Pengpeng Zhang
4. D. Dewey
5. Shelley A. Claridge

Citations in the corpus

• Hybrid strategies in nanolithography (2010, background): “Electronbeam chemical nanolithography, pioneered by Grunze and coworkers, applies the flexibility and high resolution of e-beam lithography to SAMs, using a focused electron beam to induce reactions with terminal functionalities in the monolayer [95, 96, 304, 305].”