SiC sensors: a review

By N. Wright, Alton B. Horsfall. 2007

263 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8b574f64fb54a1a0c68a06407ced0343627bf9e7

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In Atomic and Molecular Physics, and Optics

1. Stefania Castelletto

Citations in the corpus

• The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review (2015, unknown): “MEMS processing inherited from Si technologies [49], [50].”
• Silicon carbide color centers for quantum applications (2020, background): “sensors for UV and X-ray, and gas sensors [34].”