Electrostatic micromechanical actuator with extended range of travel

By E. K. Chan, R. Dutton. Journal of microelectromechanical systems, 2000

226 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/883e607ea0753efd81b2087dc96264884e4ffb7b

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. G. Sarusi
2. O. Degani
3. I. Zelniker
4. Yael Nemirovsky

In Electrical and Electronic Engineering

1. G. Sarusi
2. O. Degani
3. I. Zelniker
4. Yael Nemirovsky

Citations in the corpus

• A methodology and model for the pull-in parameters of electrostatic actuators (2001, methodology): “[21] E. K. Chan, K. Garikipati, and R. W. Dutton, “Characterization of contact electromechanics through capacitance-voltage measurements and simulations,”J. Microelectromech.”
• Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point (2002, background): “Let us remind here the results presented in [ 1 ], for the generic parallel plate geometry depicted in Fig. 1, in which a series capacitor is used to stabilize positions after the pull-in distance.”