A methodology and model for the pull-in parameters of electrostatic actuators

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Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes (2007, background): “[14] Y. Nemirovsky and O. Bochobza-Degani, “A methodology and model for the pull-in parameters of electrostatic actuators,” J. Microelectromech.”
MEMS Laser Scanners: A Review (2014, background): “The pull-in problem is treated in detail in [57] and [58].”
Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell (2008, background): “A general methodology for finding the pull-in point is given in [4].”
Charge control of parallel-plate, electrostatic actuators and the tip-in instability (2003, background): “Beyond voltage pull-in, the slope and the small-signal capacitance are negative but become zero at the charge pull-in point, provided that .”
Application of the Generalized Differential Quadrature Method to the Study of Pull-In Phenomena of MEMS Switches (2007, background): “The influence of various parameters on the pull-in voltage, such as nonlinear stiffening, fringing fields [13], trapezoidal cross section [14], residual stress [15], and axial stress, has been studied.”
Numerical and Analytical Study on the Pull-in Instability of Micro-Structure under Electrostatic Loading (2006, background): “For electrostatic force, the expression above does not account for the fringing fields effect [ 13 ,23].”