Piezoelectric properties of polycrystalline AlN thin films for MEMS application

By K. Tonisch, V. Cimalla, C. Foerster, H. Romanus, Oliver Ambacher, D. Dontsov. 2006

196 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/86f994a46f871f42e4dda7566fe615a173719d35

Citations in the corpus

• Piezoelectric MEMS sensors: state-of-the-art and perspectives (2009, unknown): “25 AlN/Si(1 1 1) [28] Metal organic chemical vapor deposition 130–250 nm 1050–1190 d33 = 5.”