Ultrathin SiO2 on Si II. Issues in quantification of the oxide thickness

By M. Seah, S. Spencer. 2002

187 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Radiation, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/84404390b4615593afec1d35befa918a75b0088b