Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge

By J. Gudmundsson, J. Alami, Ulf Helmersson. 2002

191 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/82836ac800f2da0dc39906f8eda4797b8afd75d5