Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxide

By A. Delabie, F. Bellenger, Michel Houssa, T. Conard, S. Elshocht, M. Caymax, M. Heyns, M. Meuris. 2007

264 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/82697f77e9128043c0c4119b2869562685659361