A reduced-order model for electrically actuated microbeam-based MEMS

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Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, neutral): “[36] and Xie et al.”
Nonlinear microbeam model based on strain gradient theory (2012, methodology): “which is identical to the nonlinear governing equation of the Euler–Bernoulli microbeam based on the classical elastic theory [33–35].”
A Study of the Nonlinear Response of a Resonant Microbeam to an Electric Actuation (2003, background): “The deflection at pullin is approximately 57% of the airgap space [ 6 , 7], which separates the microbeam from the stationary substrate.”
REDUCED-ORDER MODELS FOR MICROELECTROMECHANICAL RECTANGULAR AND CIRCULAR PLATES INCORPORATING THE CASIMIR FORCE (2008, methodology): “Keywords: von Kármán nonlinearity; Reduced-order nonlinear models; Frequencies; Clamped microelectromechanical plates; Casimir force”
Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation (2010, methodology): “This reduces the computational cost since the electrostatic force term in the discretized equation will not require complicated numerical integration (integrating a numerator term over a denominator term numerically is computationally expensive) [27], [28].”