Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms ☆

By K. Yamashita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, Yoshihiko Suzuki. 2002

146 citations recorded by the source corpus.

Subfields: Mechanics of Materials, Radiology, Nuclear Medicine and Imaging

View Paper: https://www.semanticscholar.org/paper/7aa1b6554a3a9613c614ee1dfb405df52506629a

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In Mechanics of Materials

1. M. Radhika
2. Srinivas Tadigadapa
3. K. Mateti
4. Venu Gopal Madhav Annamdas

Citations in the corpus

• Piezoelectric MEMS sensors: state-of-the-art and perspectives (2009, background): “Figure 23 shows the calculated directivity pattern of ultrasonic waves in air as a function of aperture size and array density [222].”
• Measurement of transverse piezoelectric properties of PZT thin films (2003, background): “For MEMS applications, Pb(Zr, Ti)O3 (PZT) thin films are considered to be the most promising materials due to their excellent ferroelectric and piezoelectric characteristics, and recently several types of micro-sensors and actuators have been studied using piezoelectric PZT thin films [1–5].”
• Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging (2015, methodology): “The etching step itself can take place either before deposition of the piezoelectric layer [28,30,64,79–81] or after completing the whole membrane stack [26,31,52].”
• Application of Electromechanical Impedance Technique for Engineering Structures: Review and Future Issues (2010, unknown): “The applications of PZT transducers are too abundant to list; however, they are mainly used in the fields of ultrasonics (Yamashita et al., 2002), noise and vibration control (Wu et al.”
• Electromechanical impedance of piezoelectric transducers for monitoring metallic and non-metallic structures: A review of wired, wireless and energy-harvesting methods (2013, background): “, 1994) and structural health monitoring (SHM) applications such as ultrasonic (Yamashita et al., 2002) and acoustic emission (Prabakar and Mallikarjun, 2005) methods.”