Local epitaxial growth of ZrO2 on Ge (100) substrates by atomic layer epitaxy

By Hyoungsub Kim, C. O. Chui, Krishna C. Saraswat, Paul C. McIntyre. 2003

132 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/787a0c9ffab64b18dd6577c95162be5f9ea0db0b