Piezoelectric thin film micromechanical beam resonators

By Don L. DeVoe. 2001

208 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/77bfcf82e3acca1ef9fa58c5e541161419e59ab4

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. M. Imboden
2. P. Mohanty

In Biomedical Engineering

1. M. Imboden
2. P. Mohanty

In Electrical and Electronic Engineering

1. M. Imboden
2. P. Mohanty

Citations in the corpus

• Dissipation in nanoelectromechanical systems (2014, methodology): “[86] also demonstrated the beneficial scaling properties of the piezoelectric actuation and detection scheme compared to the capacitive method.”