Time and frequency response of two-arm micromachined thermal actuators

By Ryan Hickey, Dan Sameoto, T. Hubbard, M. Kujath. 2003

225 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/75d511a9097ea334cf967598bbbc2930c4d1ab8e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin
3. Khadijah A Altammar

In Electrical and Electronic Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin

Citations in the corpus

• Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “There are numerous MEMS devices around us such as micro accelerometers [45, 46], DMD [45, 47, 48], MEMS pressure sensors [49, 50], micropumps [58-60], microvalves [61], optical switches [62, 63], inkjet heads, microgrippers [64, 65], and microactuators [66-70].”
• Analytical model for analysis and design of V-shaped thermal microactuators (2005, background): “Since then, a large volume of papers have been published on the subject [9], [18]‐[ 31 ].”