Role of Tin+ and Aln+ ion irradiation (n = 1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

By G. Greczynski, Jun Lu, M. Johansson, J. Jensen, I. Petrov, J. Greene, L. Hultman. 2012

133 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/7315ac2aa08c87cdd9417ee321f81e844dfdcac3