Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes

By Sergej Starschich, D. Griesche, Theodor Schneller, Rainer Waser, Ulrich Böttger. 2014

150 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/71447d2acf84dca30a2a8021c1107c8fcfed5b35