Effects of nitrogen deficiency on electronic properties of AlGaN surfaces subjected to thermal and plasma processes

By Tamotsu Hashizume, H. Hasegawa. 2004

170 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/70d61e69710e5a31f0737efb56172025e7dc02dc