Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge

By J. Gudmundsson, J. Alami, Ulf Helmersson. 2001

144 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/700591c7fbddbc4f594ff161ab2d40a2f481fd92