Three-dimensional nanolithography using proton beam writing

By J. A. Kan, A. Bettiol, F. Watt. 2003

157 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Radiation, Structural Biology

View Paper: https://www.semanticscholar.org/paper/6fd083ebf66d4be1a0821e0a42ab73938deb5120

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1. C. Acikgoz
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Citations in the corpus

• Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, methodology): “The utilization of a focused mega-electron-volt (MeV) proton beam to write accurate high-aspect-ratio walls of 30 nm width with sub-3 nm edge smoothness has been reported [34].”