Sub-5nm FIB direct patterning of nanodevices

By J. Giérak, A. Madouri, A. Biance, E. Bourhis, G. Patriarche, C. Ulysse, D. Lucot, X. Lafosse, L. Auvray, L. Bruchhaus and 1 more. 2007

133 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Molecular Biology

View Paper: https://www.semanticscholar.org/paper/6cf32dceaf501a662736a6a63d4944b1386a0358

Citations in the corpus

• Sub-10 nm fabrication: methods and applications (2021, unknown): “Subtractive post-trimming has also shown a particular capability of fine tuning the sharpness of nanotips for imaging or nanofabrication either via electrochemical or FIB processes [75, 207].”