Self-aligned self assembly of multi-nanowire silicon field effect transistors

By Charles T. Black. 2005

175 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6c393bf344e004fd88946f046cf16b723647c05d

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Joy Y. Cheng
2. Ho-Cheol Kim
3. Y. Zhang
4. Ricardo Ruiz
5. Kathryn W. Guarini
6. Matthew E. Colburn
7. Gregory Breyta

In Electrical and Electronic Engineering

1. Joy Y. Cheng
2. Ho-Cheol Kim
3. Y. Zhang
4. Ricardo Ruiz
5. Matthew E. Colburn
6. Gregory Breyta
7. Kathryn W. Guarini

Citations in the corpus

• Polymer self assembly in semiconductor microelectronics (2006, methodology): “plasma etch steps [133].”