Recent Developments in Polymer MEMS
By Chang Liu. 2007
428 citations recorded by the source corpus.
Subfields: Bioengineering, Biomedical Engineering
View Paper: https://www.semanticscholar.org/paper/6be8ffa85e3431ddaca153327bb0bed9735cbd44
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In Bioengineering
In Biomedical Engineering
Citations in the corpus
- Review of polymer MEMS micromachining (2015, background): “For additional information, the reader is also referred to [6-10] for supplementary”