Nucleation and interface formation mechanisms in atomic layer deposition of gate oxides

By M. Frank, Y. Chabal, G. Wilk. 2003

144 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6b7182ddb8e0b153bc0bdd9514c4a8de50f7f043