Surface studies of carbon films from pyrolyzed photoresist

By R. Kostecki, B. Schnyder, D. Alliata, X. Song, K. Kinoshita, R. Kötz. 2001

146 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Computational Mechanics, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/67d0a8f1238ceb08886031de3f372e9cf25a1bb9

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1. Chunlei Wang
2. Lili Taherabadi
3. Guangyao Jia
4. M. Madou
5. H. Costa
6. Mark R. Prausnitz
7. M. Gijs
8. Jeff Morse

Citations in the corpus

• A novel method for the fabrication of high-aspect ratio C-MEMS structures (2005, methodology): “Another promising C-MEMS microfabrication technique is based on the pyrolysis of photopatterned resists at different temperatures and different ambient atmospheres [12]–[14].”