Formation of a stratified lanthanum silicate dielectric by reaction with Si(001)

By M. Copel, Eduard A. Cartier, Frances M. Ross. 2001

177 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/675387850f91798fdb429dc8bc0dfc8421fc8d4a