Single mask, large force, and large displacement electrostatic linear inchworm motors

By R. Yeh, S. Hollar, Kristofer S. J. Pister. Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2001

187 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/641c4458d2ca01a180ce7cb7c1aeb9fc21864da2

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Paul K. Wright
2. Shad Roundy
3. Jan M. Rabaey
4. Alper Erturk
5. Daniel J. Inman
6. Henry Sodano
7. Shashank Priya
8. S. Anton

In Mechanical Engineering

1. Paul K. Wright
2. Shad Roundy
3. Jan M. Rabaey
4. Alper Erturk
5. Henry Sodano
6. Mohammed F. Daqaq
7. Daniel J. Inman
8. S. Anton

Citations in the corpus

• Piezoelectric ultrasonic micro/milli-scale actuators (2009, background): “These deficiencies are less important for many MEMS applications, but limit the actuator's use in most other areas.”
• A study of low level vibrations as a power source for wireless sensor nodes (2003, background): “Therefore, a deep reactive ion etching (DRIE) process capable of producing very thick, high aspect ratio features in silicon will be targeted [ 12 ].”