Piezoelectric ultrasonic micro/milli-scale actuators

By B. Watson, J. Friend, Leslie Y. Yeo. 2009

213 citations recorded by the source corpus.

Subfields: Control and Systems Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/7e732b8207a6715d7129c280ea39a32566b54324

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Susan E. Trolier-McKinstry
2. Leslie Y. Yeo
3. James R. Friend

In Materials Chemistry

1. Susan E. Trolier-McKinstry
2. Leslie Y. Yeo
3. James R. Friend

Citations in the corpus

• Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging (2015, background): “In the last several decades, ultrasound has found ever-expanding industrial and biomedical applications, such as non-destructive evaluation (NDE) [1,2], ultrasonic actuation [3], medical imaging [4,5], therapeutic ultrasound [6], and particle and cell manipulation [7,8], at frequencies from tens of ”
• Microscale acoustofluidics: Microfluidics driven via acoustics and ultrasonics (2011, background): “Although there are numerous examples, from traveling-wave motors (Watson et al., 2009) to atomic force microscopy actuators (Fantner et al., 2006), the most relevant form of electrode patterning was originally developed four decades ago in a desire to generate acoustic waves on the planar surface…”