Determination of pore-size distribution in low-dielectric thin films

By D. Gidley, W. Frieze, T. Dull, Jianing Sun, Albert F. Yee, C. V. Nguyen, Do Y. Yoon. 2000

158 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/62dc090a9411fd0e74e7e8049f17c5b29ef58f71

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. J. Young
2. Ashok Kumar
3. C. Surko
4. Gleb F. Gribakin
5. Y. Ein‐Eli
6. D. Starosvetsky

In Electronic, Optical and Magnetic Materials

1. Y. Ein‐Eli
2. D. Starosvetsky

In Mechanics of Materials

1. Gleb F. Gribakin
2. J. Young
3. Ashok Kumar
4. C. Surko
5. Jimena D. Gorfinkiel
6. S. Ptasińska

Citations in the corpus

• Positron-molecule interactions: Resonant attachment, annihilation, and bound states (2010, background): “…1995; Puska and Nieminen, 1994; Schultz and Lynn, 1988), including the Fermi surfaces in metals (Major et al., 2004), microscopic pores in solids (Gidley et al., 2000, 2006), the free volume in polymers (Dlubek et al., 1998), and the composition and structure of surfaces (David et al., 2001).”
• Chemical mechanical planarization for microelectronics applications (2004, background): “Porous materials can therefore achieve lower dielectric constants than the constituent materials [196].”