The use of hollow cathodes in deposition processes: A critical review

By S. Muhl, A. Perez. 2015

137 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5ed57b19de17f638fbb8187bb05bfa65a9d2acc2