Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique

By L. Liew, Wenge Zhang, V. Bright, L. An, Martin L. Dunn, Rishi Raj. 2001

161 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/5c3d903563379a146730932d77d7b148c2140c64

Citations in the corpus

• A novel method for the fabrication of high-aspect ratio C-MEMS structures (2005, background): “In vacuum, this outgassing would tend to be faster and thus more destructive [ 24 ].”