Materials characterization of ZrO2–SiO2 and HfO2–SiO2 binary oxides deposited by chemical solution deposition
By D. Neumayer, Eduard A. Cartier. 2001
419 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/5c11ba4af88c4ffdd69b07601dd85d4d0434f544
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In Electrical and Electronic Engineering
In Materials Chemistry
Citations in the corpus
- Oxides, Oxides, and More Oxides: High-κ Oxides, Ferroelectrics, Ferromagnetics, and Multiferroics (2009, background): “162 In addition, a 5–10 A layer of SiO 2 is formed at the interface, which eliminates in part the benefits to be gained from high-κ dielectric.”