Design of low actuation voltage RF MEMS switch

By Sergio P. Pacheco, Linda P. B. Katehi, C. T. Nguyen. IEEE MTT-S International Microwave Symposium Digest, 2000

296 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/5b15cc2bc6a0145b36bc355aa2167351012a1af9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Kamal Sarabandi
2. Linda P. B. Katehi
3. Xudong Chen

In Electrical and Electronic Engineering

1. Robert Mihailovich
2. Jeffrey DeNatale
3. Dimitrios Peroulis
4. Kamal Sarabandi
5. Sergio P. Pacheco
6. Linda P. B. Katehi
7. Michele Muccini
8. Matthew B. Longbrake

Citations in the corpus

• Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles (2003, background): “The serpentine supports are a key part of reducing the actuation voltage [12]‐[ 14 ].”
• Electromechanical considerations in developing low-voltage RF MEMS switches (2003, background): “masks, and is described in detail in [10].”
• MEM relay for reconfigurable RF circuits (2001, background): “Several recent efforts [6], [7] have addressed one device characteristic relevant to circuit implementation: development of low actuation”