Fundamentals of Microfabrication

By M. Madou. 2002

2,690 citations recorded by the source corpus.

Road Map .- Lithography .- Pattern Transfer: Dry Etching, Deposition, and Doping .- Wet Bulk Micromachining .- Dry Bulk Micromachining .- Surface Micromachining .- LIGA .- Alternative Micromachining Technologies .- Electronics Used with Micromachined Devices .- Bonding and Packaging .- Quantum Structures and Molecular Engineering .- Appendices.-

Subfields: Automotive Engineering, Biomedical Engineering, Industrial and Manufacturing Engineering

View Paper: https://www.semanticscholar.org/paper/579625429582752125a698e6eaff5cdc3e0ffba5

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Citations in the corpus

Microfluidics meets MEMS (2003, background): “bombardment of the surface with high-energy ions [11], [12].”
Rapid Fabrication of Micro‐ and Nanoscale Patterns by Replica Molding from Diatom Biosilica (2007, neutral): “[2] M.”
Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution (2005, methodology): “The classical processing of glass includes drilling with diamond bits, ultrasonic drilling [1], electrochemical discharge [2], powder blasting [3] and laser machining.”
An experimental investigation of microchannel flow with internal pressure measurements (2005, background): “According to Madou [26] the highest etching rate for a solution at 80 C is achieved with a solution of 20 % KOH to 80 % water.”
Concepts and realization of microstructure heat exchangers for enhanced heat transfer (2006, neutral): “The manufacturing of microstructure heat exchangers has previously been described in details [1,9,10].”
Opportunities for mesoscopics in thermometry and refrigeration: Physics and applications (2005, methodology): “ieved on some materials (Mochel et al., 1983)). In addition to lithographic procedures, etching of thin ﬁlms or bulk substrates represents an important step for the fabrication of the ﬁnal structure (Madou, 1997; Sze, 1985). Toward this end, insulating or conducting thin ﬁlms are exploited as maskin”