Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution

By Ciprian Iliescu, Ji Jing, F. Tay, Jianmin Miao, Tietun Sun. 2005

189 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f286052b66d889e09c074cc1774cd97eaa0604a8