Single-crystal aluminum nitride nanomechanical resonators

By A. Cleland, M. Pophristic, I. Ferguson. 2001

163 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Condensed Matter Physics

View Paper: https://www.semanticscholar.org/paper/56f60f7ff0c9fd15c2ace9caadc6496d3a7f8446

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Herre S. J. van der Zant
2. Menno Poot
3. Stephan Sylvest Keller
4. Silvan Schmid
5. Maria Tenje
6. Søren Dohn
7. Anja Boisen
8. Rui Huang

In Biomedical Engineering

1. Menno Poot
2. Herre S. J. van der Zant

Citations in the corpus

• Mechanical systems in the quantum regime (2011, background): “Equations 21 and 23 show that when the resonator is made shorter while its transverse dimensions are kept the same, the eigenfrequencies increase due to theℓ−2 term in the characteristic frequency scaleωch ≡ ℓ−2 √ D/ρA [147, 148].”
• Cantilever-like micromechanical sensors (2011, methodology): “Cleland et al have used aluminium nitride as a piezoelectrical material [195].”