Free-Standing GaN Substrates by Hydride Vapor Phase Epitaxy
By S. Park, I. Park, S. Choh. 2000
135 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Condensed Matter Physics, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/52e9ca818e54bd07906848a6ef2c4847b0daa9b0
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In Biomedical Engineering
Citations in the corpus
- Heterogeneous Integration of Compound Semiconductors (2010, background): “Bulk-type GaN wafers of high crystalline quality are usually obtained by hydride vapor-phase epitaxy growth of thick GaN layers on sapphire substrates and subsequent separation from these substrates (174).”