High Resolution Focused Ion Beams: FIB and Its Applications

By A. Wagner. 2003

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Energy properties of an EMI-Im ionic liquid ion source (2006, background): “This is evidenced from a signal shift towards higher energies with respect to (mb/ma)|Vr0| as determined by (2).”
Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “When a precursor gas such as tungsten hexacarbonyl (W(CO6)) is added into the chamber, the precursor gas is hit by the focused-ion beam leading to gas decomposition which leaves a non-volatile component (tungsten) on the surface [33].”
Introduction to Focused Ion Beams (2005, background): “More extensive details on ion-solid interactions are available elsewhere (see e.g., Orloff et al., 2003; Nastasi et al., 1996).”
Nanoantennas for visible and infrared radiation (2011, background): “FIB structuring is based on the localized sputtering of material using accelerated Ga ions extracted from a liquid metal ion source [125].”
3D reconstruction and characterization of polycrystalline microstructures using a FIB-SEM system (2006, background): “Additionally, the platinum cap tends to improve the fidelity of the serial-sectioning experiment since the smooth surface of the cap helps to eliminate “waterfalls”-vertical streaks visible on the cross-sectioned face that can be caused by surface roughness [17].”