High quality factor single-crystal diamond mechanical resonators
By P. Ovartchaiyapong, L. Pascal, B. Myers, P. Lauria, A. Jayich. 2012
155 citations recorded by the source corpus.
Single-crystal diamond is a promising material for microelectromechanical systems (MEMs) because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338 000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.
Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/501d58f7819d14f79ac7d9f83bd4bcb5ee5f691f
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In Atomic and Molecular Physics, and Optics
In Materials Chemistry
Citations in the corpus
- Dissipation in nanoelectromechanical systems (2014, result): “Surface losses at high temperatures and a mechanical defect dissipation peak at ≈50 K has also been observed in SCD MEMS scale resonators [180], in agreement with the Debye temperature for diamond of nano-crystalline diamond found by Hutchinson et al.”
- Progress in semiconductor diamond photodetectors and MEMS sensors (2021, methodology): “Mainly, three approaches were developed for the fabrication of SCD mechanical resonators: smart-cut technique based on high-energy implantation [98], direct thinning SCD plates through bonding on an insulator substrate called diamond-on-insulator (DOI) method [99,100], and Table 1.”