Beam-steering micromirrors for large optical cross-connects
By Vladimir Aksyuk, F. Pardo, D. Carr, D. Greywall, H. B. Chan, M. Simon, A. Gasparyan, Herbert Shea, V. Lifton, C. Bolle and 9 more. 2003
136 citations recorded by the source corpus.
This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 /spl times/ 256- and 1024 /spl times/ 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OXC fabrics.
Subfields: Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/4c22315c24501b912bb701cb55f5d009f7b3ee80
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In Electrical and Electronic Engineering
Citations in the corpus
- Casimir Forces and Quantum Electrodynamical Torques: Physics and Nanomechanics (2007, unknown): “The lambda router [64], [65], a device consisting of an array of thousands of voltage-controlled mirrors,”
- Optical MEMS for Lightwave Communication (2006, unknown): “focused on surface-micromachined two-axis scanners [51], [52].”
- 1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss (2003, methodology): “The electrodes for the mirrors were fabricated on a separate silicon wafer, and the two pieces were flip-chip bonded to yield a fully functional mirror-array chip [10].”