Reduced-Order Models for MEMS Applications

321 citations recorded by the source corpus.

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, background): “[40], which compares domain and point-wise expansion techniques, concluding that domain methods provide better results, provided that the basis functions are judiciously selected.”
Bistability of curved microbeams actuated by fringing electrostatic fields (2011, methodology): “Note that in the case of initially straight beams, RO models based on the Galerkin decomposition with linear eigenmodes as shape functions were proven to be a reliable tool for the analysis of the static and dynamic behavior of electrostatically operated structures [48].”
Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “An overview of reduced-order modeling techniques for MEMSs can be found in [69].”
Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation (2010, methodology): “In previous works [25]– [30], we presented analytical and computational methods, and reduced-order models (ROMs) to investigate the static and dynamic behaviors of straight microbeams under electrostatic and electric harmonic loads.”
Mathematical Analysis of Partial Differential Equations Modeling Electrostatic MEMS (2010, methodology): “in [137], especially if one accounts for moderately large deflections, since one needs to use the dynamic analogue of the von Kármán equations.”