Mechanical behavior of ultrathin microcantilever

By Jinling Yang, Takahito Ono, Masayoshi Esashi. 2000

142 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/42d0b824fefa33c03bbcb8c62af79c419fefe244

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Masayoshi Esashi
2. Takahito Ono
3. Jinling Yang

In Electrical and Electronic Engineering

1. Masayoshi Esashi
2. Takahito Ono
3. Jinling Yang

Citations in the corpus

• Energy dissipation in submicrometer thick single-crystal silicon cantilevers (2002, methodology): “As discussed in [ 7 ], the last step of the fabrication process (O asher) of the cantilevers forms a thin SiO layer on the surface, which finally causes surface energy loss [30]‐[32].”