Improved pattern transfer in soft lithography using composite stamps
By T. Odom, J. Christopher Love, D. Wolfe, K. Paul, George M. Whitesides. 2002
653 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/422f93456beb88c74d9bfa3aaecd6e553ffd3626
How researchers see this paper
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Electrical and Electronic Engineering
- Harry A. Atwater
- A. Polman
- V. Ferry
- M. Verschuuren
- R. Schropp
- Younan Xia
- D. Qin
- George M. Whitesides
Citations in the corpus
- Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, background): “To improve the mechanical stability of elastomeric stamps, alternative materials have been proposed such as composite PDMS [114], UV-curable PDMS [115] and photocurable fluorinated organic–inorganic hybrids [116].”
- Light trapping in ultrathin plasmonic solar cells. (2010, positive): “A bilayer stamp was molded from the master, consisting of a thin high-modulus polydimethylsiloxane (PDMS) layer holding the nanopatterns and a low-modulus PDMS layer to bond the rubber to a 200 µ m thick glass support for in-plane stiffness [34].”
- Soft lithography for micro- and nanoscale patterning (2010, background): “The use of thin PDMS stamps mounted on rigid supports 40 , or designs having “posts” to prevent collapse 41 , also provide solutions to these problems in some cases.”