A monolithic CMOS microhotplate-based gas sensor system
By M. Afridi, J. Suehle, M. Zaghloul, D. Berning, A. Hefner, R. Cavicchi, S. Semancik, C. B. Montgomery, C. J. Taylor. 2002
183 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/39b255a933e52179da694006e7683a75193820d2
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- Tungsten-Based SOI Microhotplates for Smart Gas Sensors (2008, methodology): “A more recent paper by the same group reports on the use of postprocessed gold electrodes instead of aluminum [14], which”