Tungsten-Based SOI Microhotplates for Smart Gas Sensors

By S. Z. Ali, Florin Udrea, William I. Milne, Julian W. Gardner. Journal of microelectromechanical systems, 2008

154 citations recorded by the source corpus.

Subfields: Bioengineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1f2b2b4f2dcdb627e4aaf6444b5a637a05f6c17e

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In Electrical and Electronic Engineering

1. A. Zettl

Citations in the corpus

• Ultrasensitive WO3 gas sensors for NO2 detection in air and low oxygen environment (2017, methodology): “The MEMS structure was fabricated in a commercial foundry and is based on silicon on insulator (SOI) technology [15].”
• Fast response integrated MEMS microheaters for ultra low power gas detection (2015, methodology): “Reducing the size of the SMO sensor is the most effective way to reduce overall power consumption, and this is typically achieved using microhotplates or microheaters [3–25].”