Helium ion microscope: A new tool for nanoscale microscopy and metrology

By B. Ward, J. Notte, N. Economou. 2006

418 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Structural Biology, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/395cb3dba7247da287286e6b34364d7b2c76e227

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In Biomedical Engineering

1. F. J. García de Abajo

In Structural Biology

1. F. J. García de Abajo

In Surfaces, Coatings and Films

1. F. J. García de Abajo

Citations in the corpus

• Optical excitations in electron microscopy (2009, background): “Actually, a helium ion microscope has been recently released (Ward et al., 2006) and achieved 2.4 Å resolution (Carl Zeiss 2008 announcement).”
• Sub-10 nm fabrication: methods and applications (2021, background): “(c) Reprinted with permission from [230].”