Flow behaviour of thin polymer films used for hot embossing lithography
By L. Heyderman, H. Schift, C. David, J. Gobrecht, T. Schweizer. 2000
358 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Computational Mechanics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/39038121f7e028a8144d2ec62dad3c64def74e62
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In Computational Mechanics
In Electrical and Electronic Engineering
Citations in the corpus
- Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography (2005, methodology): “This time is similar to the fill time defined by [8] but different by choice of plate width and weighting.”