Carbon nanotube growth by PECVD: a review
By M. Meyyappan, L. Delzeit, A. Cassell, D. Hash. 2003
740 citations recorded by the source corpus.
Subfields: Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/38e4b39fdf33edc0caabd5dad7e6ba35421b81a0
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In Materials Chemistry
Citations in the corpus
- Carbon nanotubes: synthesis, properties and engineering applications (2019, background): “Field emission in solids occurs in extreme electric field (the gradients are usually higher than 1000 V/μm for pure metals) and is strongly dependent on the work function of the emitting material [14].”
- Colloquium: Reactive plasmas as a versatile nanofabrication tool (2005, background): “Many nanofabrication processes, such as growth of carbon nanotubes sChhowalla et al., 2001; Meyyappan et al., 2003d, require specially activated thin catalyst layers se.g., Ni, Fe, Cod usually not exceeding a few tens of nm in thickness, which rearrange into individual nanoparticles on the…”
- Development of Carbon Nanotube-Based Sensors—A Review (2007, background): “Aside from the orientation, which can offer advantages for certain device designs, PECVD allows for a significant lowering of temperatures, ranging from room temperature to 100 C [35].”
- Numerical modelling of atmospheric pressure gas discharges leading to plasma production (2005, methodology): “Furthermore, plasma enhanced chemical vapour deposition (PECVD) has recently emerged as a key growth technique to produce vertically aligned nanotubes [8], and the carbon nanotube growth in dc nonthermal plasma has been simulated at low pressure [9].”
- Effects of carbon nanotube coating on flow boiling in a micro-channel (2009, background): “The purpose of the aluminum layer is to promote the segregation of annealed iron nanoparticles [17].”