An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

By K. Jia, S. Pal, Huikai Xie. Journal of microelectromechanical systems, 2009

150 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2d193cdb28f4f52a8b839bfcd3f6ce83ee8ed236