ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW

By F. Watt, A. Bettiol, J. A. Kan, E. Teo, M. Breese. 2005

268 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/30b470e159fbda8bb3450c9a6a23c92ed818159c

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In Biomedical Engineering

1. Justin D. Holmes

In Electrical and Electronic Engineering

1. Justin D. Holmes

Citations in the corpus

• New Generation Electron Beam Resists: A Review (2017, methodology): “different energies (and at different incident angles) are used for nanofabrication.(86,87)”