Stable zirconium silicate gate dielectrics deposited directly on silicon

By G. Wilk, Robert M. Wallace. 2000

309 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/302fff3c514d351d0b91e3c5a3e9a0b518a8936f