A high force low area MEMS thermal actuator

By Michael J. Sinclair. ITHERM 2000. The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.00CH37069), 2000

175 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2d8b7254840452f3dcca17c897b1339d93fc3b04

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1. M. Ellis
2. N. Sarkar
3. A. Geisberger
4. G. Skidmore
5. J. Qiu

Citations in the corpus

• Electrothermal properties and modeling of polysilicon microthermal actuators (2003, background): “HERMAL actuation in microscale devices has been demonstrated as a compact, high-force actuation technique which compliments electrostatic actuation [1]‐[ 3 ].”